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SF6 Gas tosa Handling

Vacuum Technology: Practice for Scientific Instruments ... discharge rate estimated by the build-up method is 1/3–1/6 smaller than that estimated by exhaust characteristic method, presumably because of recombination of discharged gas to chamber wall. Also, gas discharge rate of "alumina" was found to be 5 times of published data exterpolated, 0.5 Pa · m3 · s−1 · m−2 (approx.) after 1 ...

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